Sensors

SOLUTION

Project name	Customer requirement	Process Used	Purpose	Improved functionality
Temperature and flow monitoring issue	Monitor the water’s temperature and flow of equipment	TF/DF-IMP	Monitor the water’s temperature and flow of equipment	Improve water-using in process and stabilize the flow of water
Temperature and water resistance monitoring	Monitor the wafer temperature changes and chiller water quality changes in the chamber of the equipment.	PVD	Monitor wafer temperature and water resistance changes in equipment	1. Monitor wafer temperature 2. Real-time detect process issues that may be caused by unstable water quality in the cooling cycle
Real-time wafer temperature monitoring	Monitor the heating temperature changes of the wafer inside the equipment	TF-PVD	Replaces the TC wafer and monitors the heating temperature changes of the wafer during the manufacturing process in real time.	Wafer temperature monitor in real-time and upload FDC, effectively reducing wafer scrap rate.
KZ300 programming	The KZ 300 based equipment can be reused	ETCHING	Solve the problem that the client machine can’t be used	Optimize old programs to facilitate clients' resumption of use
Flowmeter
Monitor developer	Photo	Control flow and confirm accumulated traffic usage	Effectively control usage to reduce defective rates and costs
Monitor whether the water of chiller circulates normally	DF、IMP	Confirm whether the circulating water is operating normally	Control process stability
Monitor photoresist	Photo	Confirm whether the amount of photoresist is accurate	Improve yield rate
Monitor etchant	ETCHING	Monitor etchant usage	Avoid scrapping and reduce cost
Current monitoring system	Check status of motor	All	Monitor motor aging and abnormal conditions	Monitor the three-phase current value of the motor and provide early warning of motor aging problems. The upper and lower limits of the current alarm can be set.
Vibration monitoring
Monitor Pump stability	All	Monitor pump status to overhaul	Early warning of pump aging and providing customers with pump overhaul time reference
Monitor vibration of motor	All	Monitor motor aging and abnormal conditions	Monitor motor aging
Monitor vibration of shift	IMP	Confirm whether the shift vibration is stable	Improve the wafer's sliding blades due to excessive vibration
Monitor vibration of dehydrator	Etching	Check whether the motor operating status is normal	Improve wafer fragmentation exception